(2019) Contamination Particle Behavior of Aerosol Deposited Y2O3 and Y…

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작성자 NHML
댓글 0건 조회 2,160회 작성일 22-03-03 16:23

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Contamination Particle Behavior of Aerosol Deposited Y2O3 and YF3 Coatings under NF3 Plasma

Coatings 9(5):310

DOI:10.3390/coatings9050310

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Contamination Particle Behavior of Aerosol Deposited Y2O3 and YF3 Coatings under NF3 Plasma

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