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(2003) Effects of the Physical Characteristics of Cerium Oxide on Plas…

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Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation

Sang-Kyun KIM, Ungyu PAIK, Seong-Geun OH, Yong-Kook PARK, Takeo KATOH and Jea-Gun PARK

(2003) Jpn. J. Appl. Phys., 42, 1227–1230

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Papers 목록
번호	제목	글쓴이	조회	날짜
62	(2003) Metal oxide in aqueous organic solution promoted chemoselective N-sulfonylation of hydrophilic amino alcohols	NHML	1458	03-03
열람중	(2003) Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation	NHML	1282	03-03
60	(2003) Effects of mechanochemical treatment of Ni–Al(OH)3 on the preparation of carbon nanomaterials by thermal CVD	NHML	1410	03-03
59	(2003) Analysis of trihalomethanes in drinking water using headspace-SPME technique with gas chromatography	NHML	1325	03-03
58	(2003) Effect of nonionic n-octyl β-d-glucopyranoside surfactant on the stability improvement of silver polymer electrolyte membranes for olefin/paraffin separation	NHML	1436	03-03
57	(2003) Fabrication of hollow silica microspheres through the self-assembly behavior of polymers in WO emulsion	NHML	1849	03-03
56	(2003) 합성조건의 변화에 따른 FAU(Faujasite)형 제올라이트의 합성	NHML	2194	03-03
55	(2003) Headspace-solid phase microextraction 방법에 의한 DCAA & TCAA 분석에 관한 연구	NHML	1827	03-03
54	(2002) The Use of a Thermally Reversible Bond for Molecular Imprinting of Silica Spheres	NHML	1344	03-03
53	(2002) Stability of alkanoyl-6-O-ascorbates in various surfactant aggregates systems	NHML	1484	03-03
52	(2002) Preparation of spherical silica particles doped with silver nanoparticles using W/O emulsions by a Sol-Gel method	NHML	1593	03-03
51	(2002) Preparation of silver nanoparticles in hexagonal phase formed by nonionic Triton X-100 surfactant	NHML	1652	03-03
50	(2002) Preparation of PANI-coated poly(styrene-co-styrene sulfonate) nanoparticles	NHML	1600	03-03
49	(2002) Preparation of aluminum oxide particles using ammonium acetate as precipitating agent	NHML	1338	03-03
48	(2002) Preparation and characterization of polyaniline nanoparticles synthesized from DBSA micellar solution	NHML	1457	03-03
47	(2002) Emulsion properties of pseudo-ceramide PC104/water/polyoxyethylene cholesteryl ether and polyoxyethylene cetyl ether mixtures	NHML	1749	03-03
46	(2002) Distribution of Macropores in Silica Particles Prepared by Using Multiple Emulsions	NHML	1658	03-03
45	(2002) Poly (ethylene terephthalate)(PET) nanocomposites filled with fumed silicas by melt compounding	NHML	1449	03-03
44	(2002) 미생물 탈황 공정 중 Rhodococcus sp. strain IGTS8에 의하여 생성되는 Biosurfactants의 성분 분석 및 계면특성	NHML	1747	03-03
43	(2002) 비이온 계면활성제인 Span 20 이 Rhodococcus sp. strain IGTS8을 이용한 미생물 탈황공정에 미치는 영향	NHML	1370	03-03
42	(2002) W/O Emulsion을 이용한 구형 실리카 입자의 제조와 크기 제어	NHML	1877	03-03
41	(2001) Mathematical Model of Smoldering Combustion in a Carbonaceous Porous Medium Part 2 – Sensitivity Analysis of Model Parameters	NHML	1501	03-03
40	(2001) Phase diagram and emulsion properties of n-octyl β-D-glucoside/water/octanoic acid containing pseudo-ceramide mixtures	NHML	1292	03-03
39	(2001) Investigation on the Solubilization Locus of Aniline-HCl Salt in SDS Micelles with 1H NMR Spectroscopy	NHML	1821	03-03
38	(2001) Theoretical Analysis of the Effects of Cigarette Design Parameters on the Smoldering Rates, Heat Flux, and Total Heat Released during Smoldering of a Cigarette	NHML	1998	03-03
37	(2001) Preparation of Silica Particles Encapsulating Retinol Using O/W/O Multiple Emulsions	NHML	1798	03-03
36	(2001) Mixed monolayer behaviors of vitamin derivatives and cholesterol	NHML	1731	03-03
35	(2001) Kinetics of micellization: its significance to technological processes	NHML	1642	03-03
34	(2001) Effects of lidocaine–HCl salt and benzocaine on the expansion of lipid monolayers employed as bio-mimicking cell membrane	NHML	1460	03-03
33	(2001) Effects of Cs and Na ions on the interfacial properties of dodecyl sulfate solutions	NHML	1646	03-03

Papers 목록

번호

제목

글쓴이

조회

날짜

(2003) Metal oxide in aqueous organic solution promoted chemoselective N-sulfonylation of hydrophilic amino alcohols

NHML

1458

03-03

열람중

(2003) Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation